SAN JOSE, Calif. &#151 Actinix Inc. has been awarded a Phase II grant from the National Science Foundation (NSF) to complete the development of its phase-shift metrology system for advanced photomasks ...
Austin, Texas – ASML MaskTools and Photronics Inc. last week announced an agreement to promote the use of CPL masks, the latest arrow in a growing quiver of reticle-enhancement technologies that chip ...
Experts at the Table: Semiconductor Engineering sat down to discuss optical and EUV photomasks issues, as well as the challenges facing the mask business, with Naoya Hayashi, research fellow at DNP; ...