Use of modeling software can help improve process understanding, and can be used in open- or closed-loop control. Process modeling is becoming established as a method to design and optimize ...

Distributed control systems and programmable logic controllers have long been used to regulate power plant operations, but advanced techniques that have been proven in refining and other industries ...

Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

We propose an approach for the modeling, monitoring and control of operational risk in financial institutions based on a methodology that integrates business process modeling with statistical and ...