Abstract: Inductively Coupled Plasma (ICP) systems are widely employed in semiconductor manufacturing because they generate high-density plasmas. Various numerical simulation techniques are utilized ...
Comsol has upgraded its CAD simulation platform which now includes five new application-specific modules and expanded modeling and analysis tools. This includes the multibody dynamics module used to ...
COMSOL has announced the release of COMSOL Multiphysics version 5.2 providing the simulation community the only fully integrated environment for creating simulation apps. This version of COMSOL ...