Researchers from the Paul Scherrer Institute developed an EUV lithography technique that can produce conductive tracks with a separation of just five nanometers by exposing the sample indirectly ...
In the realm of science and technology, harnessing coherent light sources in the deep ultraviolet (DUV) region holds immense significance across various applications such as lithography, defect ...
The Nature Index 2025 Research Leaders — previously known as Annual Tables — reveal the leading institutions and countries/territories in the natural and health sciences, according to their output in ...
The surface of a silicon wafer is so smooth that it produces an almost perfect mirror image, as demonstrated here by Iason Giannopoulos (left) and Dimitrios Kazazis. Researchers at the Paul Scherrer ...
Researchers from the Paul Scherrer Institute, Laboratory of X-ray Nanoscience and Technologies, developed a method for producing denser circuit patterns. Modern microchips feature conductive tracks ...
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