Abstract: Silicon photonic integrated circuits and micro-electro-mechanical systems enable the design of compact, high-performance micro-opto-electro-mechanical systems (MOEMS) gyroscopes, such as ...
Abstract: The defectivity control of replacement metal gate (RMG) chemical mechanical polishing was important for high-k metal gate (HKMG) process. Micro-scratches of RMG CMP easily caused shorting or ...
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