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spiedigitallibrary.org
From omelet lithography to state-of-the-art performance resists: resist screening with EUV interference lithography
As EUV lithography becomes the new standard for electronic chip manufacturing, identifying suitable materials for higher resolution patterning stands out as a prominent challenge to reach future technology nodes. Innovative approaches to patterning are becoming more and more relevant as conventionally used photoresists approach their ...
Dec 21, 2021
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